Product image 1
Product image 2
Product image 3
Product image 4
Product image 5
HomeStore

950°C Max CSS and RTP Furnace With Rotating Holder for 12" Wafer - OTF-1200X-RTP-II-CSS-300

950°C Max CSS and RTP Furnace With Rotating Holder for 12" Wafer - OTF-1200X-RTP-II-CSS-300

OTF-1200X-RTP-II-5-R is an advanced rapid thermal processing (RTP) furnace, which is designed for CSS (Close Spaced Sublimation) film coating up to 12" wafer at the working temperature of 950°C Max. The furnace is heated by two groups of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. The top sample holder is rotatable to achieve a uniform coating. It is an excellent tool to research new generation thin films for solar cells, such as CdTe, Sulfide, and Perovskite solar cells, and also can be used for annealing 12" semiconductor wafers.

SPECIFICATIONS:
Furnace structure 
  • The Vacuum chamber ( 20" ID) is made of  Stainless steel to reach 10-5 torr via turbopump
  • Two 12" IR heating plates are located on the top of the bottom inside the chamber
  • The top sample holder is rotatable at a speed of 1 - 10 RPM for uniform film deposition
  • Max. working temperature is 950ºC and The heating rate can reach 1200oC/minute max.
  • Eurotherm precision temperature controller with +/- 0.1oC accuracy
  • Touch Screen Computer control for all processing parameters
Power
  • 208 - 240VAC, three phases, 50/60 Hz ( 380V AC 3 phase is available )
  • 60 KW max. ( 200A breaker needed )
  • A power cable is included, but no plug
Vacuum Chamber
  • Chamber dimension: ID 500mm x H 460mm
  • Two 60mm dia quartz windows are built for easy observation.
  •  One air-tight sliding baffle is built-in for blocking the evaporation source under high vacuum/
  • A precision anti-corrosion digital vacuum gauge is in the standard package (Pic. 1)
  • Vacuum level: 10-5 torr by turbopump ( Pic. 2) or 10-2 torr by a mechanical pump (pic. 3) Please click Pic.2 2 or 3 to choose the vacuum pump at extra cost
  • Pic.1 Pic. 2 Pic. 3
Heater and Sample Holder
  • Two IR heaters are located on top and bottom of the chamber with adjustable gaps from 2 - 25 mm. (Pic. 1
  • Heaters are made of stainless steel with a water cold jacket to keep heat insulation.
  • 12 " Dia. the circular wafer holder is built into the top heater for holding the substrate.
  • The graphite plates are placed on the top of the IR heater to make heating more uniform (Pic. 2)
  • The top sample holder is rotatable at an adjustable speed from 1 - 10 RPM
  • A 58L/min circulating water chiller is included for cooling heaters (Pic.3)
  • Pic. 1  Pic. 2Pic. 3
Control System
  • Two Eurotherm 3000 digital temperature controllers with 24 segments programmable offer independent controlling of top and bottom heaters with +/- 0.1ºC accuracy
  • All operations, such as temperature profiles, vacuum pressure, rotation speed, rotation speed and lifting of the flange are controlled by a touch screen computer via a PLC.
  • The computer can show the temperature and vacuum profiles and star 10 pre-set programs of processing


Working Temperature
  • Max. temperature for each heater: ≤ 950ºC.
  • Max. the temperature difference between the two heaters: ≤ 300ºC 
  • Max. Heating: < 8ºC/s ( heating single heater only )
  • Max. Cooling: < 20 ºC/s (600 - 100ºC) Max.
Heating & Cooling Rate
  • Heating: < 8ºC/s ( heating single heater only )
  • Cooling: < 10ºC/s (600 - 100ºC) Max.




Optional
  • If using corrosive gas, please use a cold trap or anti-corrosive dry pump as in pictures 1-2 at extra cost.
  • You may choose a digital MFC gas delivery system by clicking Pic. 3 below.
 Pic. 1  Pic. 2 Pic.3
Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply.
References
(Please click right to see related articles)
  • Please read the article: High-efficiency CSS CdTe Solar Cell
  • UCLA researchers improve the process for manufacturing highly efficient solar cells
  • Planar Heterojunction Perovskite Solar Cells via Vapor-Assisted Solution Process
  • Sub 150 °C Processed Meso-superstructure Perovskite Solar Cells with Enhanced Efficiency 
  • Best_Research-Cell_Efficiencies
  • Please view "Thin-film Sb2Se3 photovoltaics with oriented one-dimensional ribbons and benign grain boundaries" published by NATURE Photonics, May 18, 2015, in which an MTI tube furnace was used for Thin-film Sb2Se3 photovoltaics Rapid Thermal Evaporation processing.
$80,145.80

Original: $228,988.00

-65%
950°C Max CSS and RTP Furnace With Rotating Holder for 12" Wafer - OTF-1200X-RTP-II-CSS-300—

$228,988.00

$80,145.80

Product Information

Shipping & Returns

Description

OTF-1200X-RTP-II-5-R is an advanced rapid thermal processing (RTP) furnace, which is designed for CSS (Close Spaced Sublimation) film coating up to 12" wafer at the working temperature of 950°C Max. The furnace is heated by two groups of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. The top sample holder is rotatable to achieve a uniform coating. It is an excellent tool to research new generation thin films for solar cells, such as CdTe, Sulfide, and Perovskite solar cells, and also can be used for annealing 12" semiconductor wafers.

SPECIFICATIONS:
Furnace structure 
  • The Vacuum chamber ( 20" ID) is made of  Stainless steel to reach 10-5 torr via turbopump
  • Two 12" IR heating plates are located on the top of the bottom inside the chamber
  • The top sample holder is rotatable at a speed of 1 - 10 RPM for uniform film deposition
  • Max. working temperature is 950ºC and The heating rate can reach 1200oC/minute max.
  • Eurotherm precision temperature controller with +/- 0.1oC accuracy
  • Touch Screen Computer control for all processing parameters
Power
  • 208 - 240VAC, three phases, 50/60 Hz ( 380V AC 3 phase is available )
  • 60 KW max. ( 200A breaker needed )
  • A power cable is included, but no plug
Vacuum Chamber
  • Chamber dimension: ID 500mm x H 460mm
  • Two 60mm dia quartz windows are built for easy observation.
  •  One air-tight sliding baffle is built-in for blocking the evaporation source under high vacuum/
  • A precision anti-corrosion digital vacuum gauge is in the standard package (Pic. 1)
  • Vacuum level: 10-5 torr by turbopump ( Pic. 2) or 10-2 torr by a mechanical pump (pic. 3) Please click Pic.2 2 or 3 to choose the vacuum pump at extra cost
  • Pic.1 Pic. 2 Pic. 3
Heater and Sample Holder
  • Two IR heaters are located on top and bottom of the chamber with adjustable gaps from 2 - 25 mm. (Pic. 1
  • Heaters are made of stainless steel with a water cold jacket to keep heat insulation.
  • 12 " Dia. the circular wafer holder is built into the top heater for holding the substrate.
  • The graphite plates are placed on the top of the IR heater to make heating more uniform (Pic. 2)
  • The top sample holder is rotatable at an adjustable speed from 1 - 10 RPM
  • A 58L/min circulating water chiller is included for cooling heaters (Pic.3)
  • Pic. 1  Pic. 2Pic. 3
Control System
  • Two Eurotherm 3000 digital temperature controllers with 24 segments programmable offer independent controlling of top and bottom heaters with +/- 0.1ºC accuracy
  • All operations, such as temperature profiles, vacuum pressure, rotation speed, rotation speed and lifting of the flange are controlled by a touch screen computer via a PLC.
  • The computer can show the temperature and vacuum profiles and star 10 pre-set programs of processing


Working Temperature
  • Max. temperature for each heater: ≤ 950ºC.
  • Max. the temperature difference between the two heaters: ≤ 300ºC 
  • Max. Heating: < 8ºC/s ( heating single heater only )
  • Max. Cooling: < 20 ºC/s (600 - 100ºC) Max.
Heating & Cooling Rate
  • Heating: < 8ºC/s ( heating single heater only )
  • Cooling: < 10ºC/s (600 - 100ºC) Max.




Optional
  • If using corrosive gas, please use a cold trap or anti-corrosive dry pump as in pictures 1-2 at extra cost.
  • You may choose a digital MFC gas delivery system by clicking Pic. 3 below.
 Pic. 1  Pic. 2 Pic.3
Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply.
References
(Please click right to see related articles)
  • Please read the article: High-efficiency CSS CdTe Solar Cell
  • UCLA researchers improve the process for manufacturing highly efficient solar cells
  • Planar Heterojunction Perovskite Solar Cells via Vapor-Assisted Solution Process
  • Sub 150 °C Processed Meso-superstructure Perovskite Solar Cells with Enhanced Efficiency 
  • Best_Research-Cell_Efficiencies
  • Please view "Thin-film Sb2Se3 photovoltaics with oriented one-dimensional ribbons and benign grain boundaries" published by NATURE Photonics, May 18, 2015, in which an MTI tube furnace was used for Thin-film Sb2Se3 photovoltaics Rapid Thermal Evaporation processing.

You may also like

-65%NEW
Thumbnail 1Thumbnail 2

2300ºC Max. Induction heated Tube Furnace (30 mm ID Graphite Tube) with IR Temp.-Controlled - GSL-2300X-C

$155,998.00

$54,599.30

-65%NEW
Thumbnail 1Thumbnail 2

1200°C Max. 5" Sliding Tube Furnace for Rapidly Thermal Processing - OTF-1200X-RTP-5S

$19,998.00

$6,999.30

-65%NEW
Thumbnail 1Thumbnail 2

1100°C Crucible Melting Furnace with Stirring Function for Glovebox - KSL1100XSVRM

$7,998.00

$2,799.30

NEW
Thumbnail 1Thumbnail 2

1200°C Sliding Tube Furnace(100mm OD) for Rapidly Thermal Processing - OTF-1200X-100-EDSL

$19,998.00

NEW
Thumbnail 1Thumbnail 2

800°C High Vacuum & Pressure Chamber Furnace (500x500x500 mm up to 3.5 bar) GSL-800-L

$199,986.00

-65%NEW
Thumbnail 1Thumbnail 2

7KW Induction Heating System (80mm OD Tube, up to 1900ºC) with Temperature-Control - SP7TC

$25,998.00

$9,099.30

-65%NEW
Thumbnail 1Thumbnail 2

1200°C Max. Automatic Sliding Dual Furnace (Ø50mm) for TMDs Growth - OTF-1200X-50-DFSL

$13,850.00

$4,847.50

-65%NEW
Thumbnail 1Thumbnail 2

1200C Max. Dual Furnace (80mm Dia Tube) with One Furnace Slidable for TCVD - OTF-1200X-80-DFSL

$39,898.00

$13,964.30

NEW
Thumbnail 1Thumbnail 2

1100C Compact Top-loading Vertical 2" OD Vacuum Tube Furnace - KSL-1100X-HV

$3,998.00

-65%NEW
Thumbnail 1Thumbnail 2

Two Zone IR-Heating RTP Tube Furnace (4'' ID ) with Sliding Sample Holders - OTF-1200X-IR-IISL

$24,490.00

$8,571.50

-65%NEW
Thumbnail 1Thumbnail 2

Horizontal Directed Crystallization (HDC) Tube Furnace, 1100C Max. - OTF-1200X-50-DSL

$14,998.00

$5,249.30

-65%NEW
Thumbnail 1Thumbnail 2

Automated Sliding Tube Furnace (2"OD, 1100°C max.) for Fast Heating / Cooling - OTF1200XSL50

$7,498.00

$2,624.30