VBF-1200X-H8 is a chamber furnace with a Ø7.5" ID x 13.4"L horizontal quartz chamber. The hermetic chamber allows heat treatment under a controlled atmosphere and vacuum conditions, up to 1100°C.
SPECIFICATIONS
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Power
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- 208 - 240 VAC, single phase, 50/60Hz, 20 A
- 4.0 kVA
- One power cable is included without a plug.
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Working Temperature
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Heating Rate
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- < 20 °C/min
- <10 °C/min, recommended.
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Heating Module
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⌀240 * 260 mm Fe-Cr-Al wires
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Processing Tube
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| Flanges |
- Multifunctional stainless steel water-cooled flange assembly
- two 1/4" quick-connect ports with silicone o-rings
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| Thermal Block |
- One Al2O3 foam refractory block (Ø190 * 50mm)
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| Gas Inlet and Outlet |
- One gas inlet and outlet ( 8 mm barbed fitting)
- One KF25 port for vacuum connection
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Water Chiller
(Optional)
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- Water chiller is required but not included at T > 500 °C
- MTI recommend using KJ5000 water chiller
- Two Ø12 mm push-to-connect for water connection
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| Temperature Controller |
- Proportional–integral–derivative (PID) temperature controller
- Auto-tune for PID parameters
- 30 segments programmed with ramping, cooling, and dwelling steps
- Built-in over-temperature alarm and thermocouple failure alarm
- +/- 1 ºC temperature control accuracy
- The Default DB9 PC communication port is included for connecting to a PC
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Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy.
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| Options |
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Digital Pressure Gauge with a range from 3.8x10-5 to 1125 Torr.
- Quartz sample platform
- Quartz wafer boat
- Quartz Thermal Block
- Front Door Seals
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Sample Holder
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Quartz boat for wafer
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Quartz Thermal Block
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Pressure
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Vacuum Level
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- <5e-2 torr with a mechanical vacuum pump
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Compliance
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- CE Certified
- NRTL or CSA certification is available upon request at extra cost.
- Patten Number: ZL-2011-2-0102249.4 SINCE 2011-5-19
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Application Note
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- Furnaces are designed for use under vacuum and at low-pressure < 0.2 bars
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